Chemical vapor deposition multi-scale problem diffusion equations PID control Adaptive Step-size Control in Simulation of diffusive CVD Processes Juergen Geiser Geiser Juergen Christian Fleck Fleck Christian Institut für Mathematik, Humboldt-Universität zu Berlin (ISSN 0863-0976), 27 pp.

Adaptive Step-size Control in Simulation of diffusive CVD Processes

Juergen Geiser , Christian Fleck

Preprint series: Institut für Mathematik, Humboldt-Universität zu Berlin (ISSN 0863-0976), 27 pp.

MSC 2000

35K25 General theory of higher-order, parabolic equations
35K20 Boundary value problems for second-order, parabolic equations

Abstract
In this paper, we present control strategies of a diffusion process for chemical vapor deposition for metallic bipolar plates. In the models, we discuss the application of different models to simulate the plasma-transport of chemical reactants in the gas-chamber. The contribution are an optimal control problem based on a PID control to obtain an homogeneous layering. We taken into account one- and two-dimensional problems, that are given with constraints and control functions. A finite element formulation with adaptive feedback control for time-step selection has been developed for the diffusion process. The optimization is presented with efficient algorithms. Numerical experiments are discussed with respect to the diffusion processes of the macro-scopic model.

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