Modeling and Simulation for Physical Vapor Deposition: Multiscale Model

Juergen Geiser , Robert Roehle

Preprint series: Institut für Mathematik, Humboldt-Universität zu Berlin (ISSN 0863-0976), 32 pp.

MSC 2000

35K25 General theory of higher-order, parabolic equations

35K20 Boundary value problems for second-order, parabolic equations

Abstract
In this paper, we present modeling and simulation for physical vapor deposition for metallic bipolar plates. In the models, we discuss the application of different models to simulate the transport of chemical reactions of the gas species in the gas-chamber. The so called sputter process is an extremely sensitive process to deposit thin layers to metallic plates. We taken into account lower order models to obtain first results with respect to the gas fluxes and the kinetics in the chamber. The model equations can be treated analytically in some circumstances and complicate multi-dimensional models are solved numerically with a software-packages (UG unstructed grids). Because of multi-scaling and multi-physical behavior of the models, we discuss adapted schemes to solve more accurate in the different domains and scales. The results are discussed with physical experiments to give a valid model for the assumed growth of thin layers.